Pressure Dependence of Rate Coefficients of Unimolecular and Chemical Activation Reactions Connected to the Potential Energy Wells of Si(2)H(2)Cl(4), Si(2)Cl(6), and Si(2)Cl(4) via Rice–Ramsperger–Kassel–Marcus Calculations

[Image: see text] Rate coefficients for elementary reactions connected to the potential energy wells of Si(2)H(2)Cl(4), Si(2)Cl(6), and Si(2)Cl(4), which are important Si(2) species in chemical vapor deposition (CVD) processes that use chlorosilanes as silicon source gases, were determined through t...

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Detalles Bibliográficos
Autores principales: Noda, Kaito, Jagawa, Yoshihiro, Fuwa, Akio, Kunioshi, Nílson
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9706569/
https://www.ncbi.nlm.nih.gov/pubmed/36371745
http://dx.doi.org/10.1021/acs.jpca.2c06195

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9706569/
https://www.ncbi.nlm.nih.gov/pubmed/36371745
http://dx.doi.org/10.1021/acs.jpca.2c06195

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