The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that ar...

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Detalles Bibliográficos
Autores principales: Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9712524/
https://www.ncbi.nlm.nih.gov/pubmed/36465157
http://dx.doi.org/10.1038/s41378-022-00458-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9712524/
https://www.ncbi.nlm.nih.gov/pubmed/36465157
http://dx.doi.org/10.1038/s41378-022-00458-z

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