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Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring
Three-dimensional (3D) micro/nano structures are significant in many applications because of their novel multi-functions and potential in high integration. As is known, the traditional methods for the processing of 3D micro/nano structures exhibit disadvantages in mass production and machining preci...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9732930/ https://www.ncbi.nlm.nih.gov/pubmed/36540223 http://dx.doi.org/10.1039/d2ra05148f |