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Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

Three-dimensional (3D) micro/nano structures are significant in many applications because of their novel multi-functions and potential in high integration. As is known, the traditional methods for the processing of 3D micro/nano structures exhibit disadvantages in mass production and machining preci...

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Detalles Bibliográficos
Autores principales: Yang, Xiaomeng, Song, Ruiqi, He, Liang, Wu, Leixin, He, Xin, Liu, Xiaoyu, Tang, Hui, Lu, Xiaolong, Ma, Zeyu, Tian, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9732930/
https://www.ncbi.nlm.nih.gov/pubmed/36540223
http://dx.doi.org/10.1039/d2ra05148f