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Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators

Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, g...

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Detalles Bibliográficos
Autores principales: Liu, Chun-You, Li, Sheng-Shian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9734146/
https://www.ncbi.nlm.nih.gov/pubmed/36494500
http://dx.doi.org/10.1038/s41598-022-26014-3