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Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators
Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, g...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9734146/ https://www.ncbi.nlm.nih.gov/pubmed/36494500 http://dx.doi.org/10.1038/s41598-022-26014-3 |