An Ultra-Precision Absolute-Type Multi-Degree-of-Freedom Grating Encoder

An absolute-type four-degree-of-freedom (four-DOF) grating encoder that can simultaneously measure the three-axis pose (θx, θy, θz) and one-axis out-of-plane position (Z) of an object with high accuracy is demonstrated for the first time in this research. This grating encoder is composed of a statio...

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Detalles Bibliográficos
Autores principales: Wang, Shengtong, Luo, Linbin, Zhu, Junhao, Shi, Ningning, Li, Xinghui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735561/
https://www.ncbi.nlm.nih.gov/pubmed/36501749
http://dx.doi.org/10.3390/s22239047

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735561/
https://www.ncbi.nlm.nih.gov/pubmed/36501749
http://dx.doi.org/10.3390/s22239047

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