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An Ultra-Precision Absolute-Type Multi-Degree-of-Freedom Grating Encoder
An absolute-type four-degree-of-freedom (four-DOF) grating encoder that can simultaneously measure the three-axis pose (θx, θy, θz) and one-axis out-of-plane position (Z) of an object with high accuracy is demonstrated for the first time in this research. This grating encoder is composed of a statio...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735561/ https://www.ncbi.nlm.nih.gov/pubmed/36501749 http://dx.doi.org/10.3390/s22239047 |