Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the mea...

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Detalles Bibliográficos
Autores principales: Hong, Yifan, Sato, Ryo, Shimizu, Yuki, Matsukuma, Hiraku, Shimizu, Hiroki, Gao, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735631/
https://www.ncbi.nlm.nih.gov/pubmed/36502264
http://dx.doi.org/10.3390/s22239563

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735631/
https://www.ncbi.nlm.nih.gov/pubmed/36502264
http://dx.doi.org/10.3390/s22239563

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