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Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range
A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the mea...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9735631/ https://www.ncbi.nlm.nih.gov/pubmed/36502264 http://dx.doi.org/10.3390/s22239563 |