Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

A new method based on the interferometric pseudo-lateral-shearing method is proposed to evaluate the pitch variation of a large-scale planar variable-line-spacing (VLS) grating. In the method, wavefronts of the first-order diffracted beams from a planar VLS grating are measured by a commercial Fizea...

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Detalles Bibliográficos
Autores principales: Xiong, Xin, Yin, Chenguang, Quan, Lue, Sato, Ryo, Matsukuma, Hiraku, Shimizu, Yuki, Tamiya, Hideaki, Gao, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736133/
https://www.ncbi.nlm.nih.gov/pubmed/36502050
http://dx.doi.org/10.3390/s22239348

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736133/
https://www.ncbi.nlm.nih.gov/pubmed/36502050
http://dx.doi.org/10.3390/s22239348

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