Optical Temperature Sensor Based on Polysilicon Waveguides

Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si)...

Descripción completa

Detalles Bibliográficos
Autores principales: Xu, Xinru, Yin, Yuexin, Sun, Chunlei, Li, Lan, Lin, Hongtao, Tang, Bo, Zhang, Peng, Chen, Changming, Zhang, Daming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736333/
https://www.ncbi.nlm.nih.gov/pubmed/36502058
http://dx.doi.org/10.3390/s22239357

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736333/
https://www.ncbi.nlm.nih.gov/pubmed/36502058
http://dx.doi.org/10.3390/s22239357

Ejemplares similares