Crystalline Quality and Surface Morphology Improvement of Face-to-Face Annealed MBE-Grown AlN on h-BN

In this study, AlN epilayers were grown by ammonia-assisted molecular beam epitaxy on 3 nm h-BN grown on c-sapphire substrates. Their structural properties were investigated by comparing as-grown and postgrowth annealed layers. The role of annealing on the crystalline quality and surface morphology...

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Detalles Bibliográficos
Autores principales: Zaiter, Aly, Michon, Adrien, Nemoz, Maud, Courville, Aimeric, Vennéguès, Philippe, Ottapilakkal, Vishnu, Vuong, Phuong, Sundaram, Suresh, Ougazzaden, Abdallah, Brault, Julien
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736891/
https://www.ncbi.nlm.nih.gov/pubmed/36500097
http://dx.doi.org/10.3390/ma15238602

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9736891/
https://www.ncbi.nlm.nih.gov/pubmed/36500097
http://dx.doi.org/10.3390/ma15238602

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