Effect of Nitrogen Doping on Tribological Properties of Ta(2)O(5) Coatings Deposited by RF Magnetron Sputtering

Ta(2)O(5) was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N(2) were injected, and the total sputtering gas (N(2)+Ar...

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Detalles Bibliográficos
Autores principales: Chao, Rui, Cai, Haichao, Li, Hang, Xue, Yujun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9737371/
https://www.ncbi.nlm.nih.gov/pubmed/36499788
http://dx.doi.org/10.3390/ma15238291

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9737371/
https://www.ncbi.nlm.nih.gov/pubmed/36499788
http://dx.doi.org/10.3390/ma15238291

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