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Effect of Nitrogen Doping on Tribological Properties of Ta(2)O(5) Coatings Deposited by RF Magnetron Sputtering
Ta(2)O(5) was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N(2) were injected, and the total sputtering gas (N(2)+Ar...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9737371/ https://www.ncbi.nlm.nih.gov/pubmed/36499788 http://dx.doi.org/10.3390/ma15238291 |