Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

We have designed a hot-plate-type micro-Pirani vacuum gauge with a simple structure and compatibility with conventional semiconductor fabrication processes. In the Pirani gauge, we used a vanadium oxide (VOx) membrane as the thermosensitive component, taking advantage of the high temperature coeffic...

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Detalles Bibliográficos
Autores principales: Guo, Song, Feng, Liuhaodong, Chen, Shuo, Ji, Yucheng, Peng, Xinlin, Xu, Yang, Yin, Yong, Wang, Shinan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739492/
https://www.ncbi.nlm.nih.gov/pubmed/36501977
http://dx.doi.org/10.3390/s22239275

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739492/
https://www.ncbi.nlm.nih.gov/pubmed/36501977
http://dx.doi.org/10.3390/s22239275

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