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Effects of Oxygen Flow Rate on Metal-to-Insulator Transition Characteristics in NbO(x)-Based Selectors
In this work, NbOx-based selector devices were fabricated by sputtering deposition systems. Metal-to-insulator transition characteristics of the device samples were investigated depending on the oxygen flow rate (3.5, 4.5, and 5.5 sccm) and the deposition time. The device stack was scanned by transm...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739534/ https://www.ncbi.nlm.nih.gov/pubmed/36500071 http://dx.doi.org/10.3390/ma15238575 |