Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors

The integrated device for energy supply and sensing (IDESS) is a potential candidate for relieving the energy and space burdens caused by the rising integration degrees of microsystems. In this article, we propose a force sensor based on an interdigital supercapacitor (IDTSC). The capacitance and in...

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Detalles Bibliográficos
Autores principales: Huang, Jue, Dai, Keren, Yin, Yajiang, Chen, Zhaorong, You, Zheng, Wang, Xiaofeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739844/
https://www.ncbi.nlm.nih.gov/pubmed/36501970
http://dx.doi.org/10.3390/s22239268

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739844/
https://www.ncbi.nlm.nih.gov/pubmed/36501970
http://dx.doi.org/10.3390/s22239268

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