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Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors
The integrated device for energy supply and sensing (IDESS) is a potential candidate for relieving the energy and space burdens caused by the rising integration degrees of microsystems. In this article, we propose a force sensor based on an interdigital supercapacitor (IDTSC). The capacitance and in...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739844/ https://www.ncbi.nlm.nih.gov/pubmed/36501970 http://dx.doi.org/10.3390/s22239268 |