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Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications
In this study, a silicon carbon nitride (SiCN) thin film was grown with a thickness of 5~70 nm by the plasma-enhanced chemical vapor deposition (PECVD) method, and the oxygen permeation characteristics were analyzed according to the partial pressure ratio (PPR) of tetramethylsilane (4MS) to the tota...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9740046/ https://www.ncbi.nlm.nih.gov/pubmed/36500965 http://dx.doi.org/10.3390/nano12234342 |
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author | Song, Myeong-Ho Ko, Woon-San Kim, Geun-Ho Choi, Dong-Hyeuk Lee, Ga-Won |
author_facet | Song, Myeong-Ho Ko, Woon-San Kim, Geun-Ho Choi, Dong-Hyeuk Lee, Ga-Won |
author_sort | Song, Myeong-Ho |
collection | PubMed |
description | In this study, a silicon carbon nitride (SiCN) thin film was grown with a thickness of 5~70 nm by the plasma-enhanced chemical vapor deposition (PECVD) method, and the oxygen permeation characteristics were analyzed according to the partial pressure ratio (PPR) of tetramethylsilane (4MS) to the total gas amount during the film deposition. X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FT-IR), and X-ray reflectivity (XRR) were used to investigate the composition and bonding structures of the SiCN film. An atomic force microscope (AFM) was used to examine the surface morphology of the SiCN films to see the porosity. The analysis indicated that Si–N bonds were dominant in the SiCN films, and a higher carbon concentration made the film more porous. To evaluate the oxygen permeation, a highly accelerated temperature and humidity stress test (HAST) evaluation was performed. The films grown at a high 4MS PPR were more susceptible to oxygen penetration, which changed Si–N bonds to Si–N–O bonds during the HAST. These results indicate that increasing the 4MS PPR made the SiCN film more porous and containable for oxygen. As an application, for the first time, SiCN dielectric film is suggested to be applied to resistive random access memory (RRAM) as an oxygen reservoir to store oxygen and prevent a reaction between metal electrodes and oxygen. The endurance characteristics of RRAM are found to be enhanced by applying the SiCN. |
format | Online Article Text |
id | pubmed-9740046 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-97400462022-12-11 Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications Song, Myeong-Ho Ko, Woon-San Kim, Geun-Ho Choi, Dong-Hyeuk Lee, Ga-Won Nanomaterials (Basel) Article In this study, a silicon carbon nitride (SiCN) thin film was grown with a thickness of 5~70 nm by the plasma-enhanced chemical vapor deposition (PECVD) method, and the oxygen permeation characteristics were analyzed according to the partial pressure ratio (PPR) of tetramethylsilane (4MS) to the total gas amount during the film deposition. X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FT-IR), and X-ray reflectivity (XRR) were used to investigate the composition and bonding structures of the SiCN film. An atomic force microscope (AFM) was used to examine the surface morphology of the SiCN films to see the porosity. The analysis indicated that Si–N bonds were dominant in the SiCN films, and a higher carbon concentration made the film more porous. To evaluate the oxygen permeation, a highly accelerated temperature and humidity stress test (HAST) evaluation was performed. The films grown at a high 4MS PPR were more susceptible to oxygen penetration, which changed Si–N bonds to Si–N–O bonds during the HAST. These results indicate that increasing the 4MS PPR made the SiCN film more porous and containable for oxygen. As an application, for the first time, SiCN dielectric film is suggested to be applied to resistive random access memory (RRAM) as an oxygen reservoir to store oxygen and prevent a reaction between metal electrodes and oxygen. The endurance characteristics of RRAM are found to be enhanced by applying the SiCN. MDPI 2022-12-06 /pmc/articles/PMC9740046/ /pubmed/36500965 http://dx.doi.org/10.3390/nano12234342 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Song, Myeong-Ho Ko, Woon-San Kim, Geun-Ho Choi, Dong-Hyeuk Lee, Ga-Won Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title | Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title_full | Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title_fullStr | Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title_full_unstemmed | Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title_short | Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications |
title_sort | studies on oxygen permeation resistance of sicn thin film and rram applications |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9740046/ https://www.ncbi.nlm.nih.gov/pubmed/36500965 http://dx.doi.org/10.3390/nano12234342 |
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