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Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope

This paper describes the combination of experimental measurements with mathematical–physical analysis during the investigation of flow in an aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its o...

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Detalles Bibliográficos
Autores principales: Šabacká, Pavla, Maxa, Jiří, Bayer, Robert, Vyroubal, Petr, Binar, Tomáš
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9740474/
https://www.ncbi.nlm.nih.gov/pubmed/36501735
http://dx.doi.org/10.3390/s22239033