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Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope

This paper describes the combination of experimental measurements with mathematical–physical analysis during the investigation of flow in an aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its o...

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Detalles Bibliográficos
Autores principales: Šabacká, Pavla, Maxa, Jiří, Bayer, Robert, Vyroubal, Petr, Binar, Tomáš
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9740474/
https://www.ncbi.nlm.nih.gov/pubmed/36501735
http://dx.doi.org/10.3390/s22239033
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author Šabacká, Pavla
Maxa, Jiří
Bayer, Robert
Vyroubal, Petr
Binar, Tomáš
author_facet Šabacká, Pavla
Maxa, Jiří
Bayer, Robert
Vyroubal, Petr
Binar, Tomáš
author_sort Šabacká, Pavla
collection PubMed
description This paper describes the combination of experimental measurements with mathematical–physical analysis during the investigation of flow in an aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were taken during the pumping of the chamber. This process converted the atmospheric pressure into the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical–physical model was tuned in the Ansys Fluent system and subsequently used for mathematical–physical analysis in a slip flow regime on a nozzle wall at low pressure. These analyses will be used to fine-tune the experimental chamber. Once the chamber is operational, it will be possible to compare the results obtained from the experimental measurements of the nozzle wall pressure, static pressure, total pressure and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical–physical analyses. Based on the above comparative analyses, we will be able to determine the realistic slip flow at the nozzle wall under different conditions at the continuum mechanics boundary.
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spelling pubmed-97404742022-12-11 Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope Šabacká, Pavla Maxa, Jiří Bayer, Robert Vyroubal, Petr Binar, Tomáš Sensors (Basel) Article This paper describes the combination of experimental measurements with mathematical–physical analysis during the investigation of flow in an aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were taken during the pumping of the chamber. This process converted the atmospheric pressure into the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical–physical model was tuned in the Ansys Fluent system and subsequently used for mathematical–physical analysis in a slip flow regime on a nozzle wall at low pressure. These analyses will be used to fine-tune the experimental chamber. Once the chamber is operational, it will be possible to compare the results obtained from the experimental measurements of the nozzle wall pressure, static pressure, total pressure and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical–physical analyses. Based on the above comparative analyses, we will be able to determine the realistic slip flow at the nozzle wall under different conditions at the continuum mechanics boundary. MDPI 2022-11-22 /pmc/articles/PMC9740474/ /pubmed/36501735 http://dx.doi.org/10.3390/s22239033 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Šabacká, Pavla
Maxa, Jiří
Bayer, Robert
Vyroubal, Petr
Binar, Tomáš
Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title_full Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title_fullStr Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title_full_unstemmed Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title_short Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope
title_sort slip flow analysis in an experimental chamber simulating differential pumping in an environmental scanning electron microscope
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9740474/
https://www.ncbi.nlm.nih.gov/pubmed/36501735
http://dx.doi.org/10.3390/s22239033
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