Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleratio...

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Detalles Bibliográficos
Autores principales: Xin, Chenguang, Zhang, Zhongyao, Wang, Xuhu, Fan, Changjiang, Li, Mengwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9755286/
https://www.ncbi.nlm.nih.gov/pubmed/36522446
http://dx.doi.org/10.1038/s41598-022-25760-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9755286/
https://www.ncbi.nlm.nih.gov/pubmed/36522446
http://dx.doi.org/10.1038/s41598-022-25760-8

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