Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleratio...

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Autores principales: Xin, Chenguang, Zhang, Zhongyao, Wang, Xuhu, Fan, Changjiang, Li, Mengwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9755286/
https://www.ncbi.nlm.nih.gov/pubmed/36522446
http://dx.doi.org/10.1038/s41598-022-25760-8
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author Xin, Chenguang
Zhang, Zhongyao
Wang, Xuhu
Fan, Changjiang
Li, Mengwei
author_facet Xin, Chenguang
Zhang, Zhongyao
Wang, Xuhu
Fan, Changjiang
Li, Mengwei
author_sort Xin, Chenguang
collection PubMed
description In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/[Formula: see text] m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits.
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spelling pubmed-97552862022-12-17 Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides Xin, Chenguang Zhang, Zhongyao Wang, Xuhu Fan, Changjiang Li, Mengwei Sci Rep Article In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/[Formula: see text] m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits. Nature Publishing Group UK 2022-12-15 /pmc/articles/PMC9755286/ /pubmed/36522446 http://dx.doi.org/10.1038/s41598-022-25760-8 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Xin, Chenguang
Zhang, Zhongyao
Wang, Xuhu
Fan, Changjiang
Li, Mengwei
Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title_full Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title_fullStr Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title_full_unstemmed Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title_short Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
title_sort ultracompact single-layer optical mems accelerometer based on evanescent coupling through silicon nanowaveguides
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9755286/
https://www.ncbi.nlm.nih.gov/pubmed/36522446
http://dx.doi.org/10.1038/s41598-022-25760-8
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