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Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleratio...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9755286/ https://www.ncbi.nlm.nih.gov/pubmed/36522446 http://dx.doi.org/10.1038/s41598-022-25760-8 |