Miniaturized structured illumination microscopy using two 3-axis MEMS micromirrors

We present the development and performance characterisation of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via 2 micro-electro-mechanical system (MEMS) three-axis scanning micromirrors. The implementation of MEMS micro...

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Detalles Bibliográficos
Autores principales: Tinning, Peter, Donnachie, Mark, Christopher, Jay, Uttamchandani, Deepak, Bauer, Ralf
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Optica Publishing Group 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9774859/
https://www.ncbi.nlm.nih.gov/pubmed/36589569
http://dx.doi.org/10.1364/BOE.475811

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9774859/
https://www.ncbi.nlm.nih.gov/pubmed/36589569
http://dx.doi.org/10.1364/BOE.475811

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