Switch mode capacitive pressure sensors

Switch mode capacitive pressure sensors are proposed as a new class of microfabricated devices that transform pressure into a mechanically switching capacitance to form an analog-to-digital signal with zero power, high sensitivity, and a high signal-to-noise ratio. A pressure-sensitive gold membrane...

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Detalles Bibliográficos
Autores principales: Shalabi, Nabil, Searles, Kyle, Takahata, Kenichi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9780122/
https://www.ncbi.nlm.nih.gov/pubmed/36568136
http://dx.doi.org/10.1038/s41378-022-00469-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9780122/
https://www.ncbi.nlm.nih.gov/pubmed/36568136
http://dx.doi.org/10.1038/s41378-022-00469-w

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