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Sublayer-Enhanced Growth of Highly Ordered Mn(5)Ge(3) Thin Film on Si(111)
Mn(5)Ge(3) epitaxial thin films previously grown mainly on Ge substrate have been synthesized on Si(111) using the co-deposition of Mn and Ge at a temperature of 390 °C. RMS roughness decreases by almost a factor of two in the transition from a completely polycrystalline to a highly ordered growth m...
Autores principales: | , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9780961/ https://www.ncbi.nlm.nih.gov/pubmed/36558219 http://dx.doi.org/10.3390/nano12244365 |