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Investigation of the Effects of Pulse-Atomic Force Nanolithography Parameters on 2.5D Nanostructures’ Morphology

In recent years, Atomic Force Microscope (AFM)-based nanolithography techniques have emerged as a very powerful approach for the machining of countless types of nanostructures. However, the conventional AFM-based nanolithography methods suffer from low efficiency, low rate of patterning, and high co...

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Detalles Bibliográficos
Autores principales: Pellegrino, Paolo, Farella, Isabella, Cascione, Mariafrancesca, De Matteis, Valeria, Bramanti, Alessandro Paolo, Della Torre, Antonio, Quaranta, Fabio, Rinaldi, Rosaria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9781517/
https://www.ncbi.nlm.nih.gov/pubmed/36558273
http://dx.doi.org/10.3390/nano12244421