Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method

The optimal groove design of a MEMS piezoresistive pressure sensor for ultra-low pressure measurement is proposed in this work. Two designs of the local groove and one design of the annular groove are investigated. The sensitivity and linearity of the sensor are investigated due to the variations of...

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Detalles Bibliográficos
Autores principales: Thawornsathit, Phongsakorn, Juntasaro, Ekachai, Rattanasonti, Hwanjit, Pengpad, Putapon, Saejok, Karoon, Leepattarapongpan, Chana, Chaowicharat, Ekalak, Jeamsaksiri, Wutthinan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9781525/
https://www.ncbi.nlm.nih.gov/pubmed/36557545
http://dx.doi.org/10.3390/mi13122247

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9781525/
https://www.ncbi.nlm.nih.gov/pubmed/36557545
http://dx.doi.org/10.3390/mi13122247

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