Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation

A Monte Carlo (MC) and molecular dynamics (MD) coupling simulation scheme for sputtered particle transport was first proposed in this work. In this scheme, the MC method was utilized to model the free-flight process of sputtered atoms, while the MD model was adopted to simulate the collision between...

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Detalles Bibliográficos
Autores principales: Zhu, Guo, Du, Qixin, Xiao, Baijun, Chen, Ganxin, Gan, Zhiyin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782040/
https://www.ncbi.nlm.nih.gov/pubmed/36556710
http://dx.doi.org/10.3390/ma15248904

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782040/
https://www.ncbi.nlm.nih.gov/pubmed/36556710
http://dx.doi.org/10.3390/ma15248904

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