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Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure
I Microhotplates are critical devices in various MEMS sensors that could provide appropriate operating temperatures. In this paper, a novel design of poly-Si membrane microhotplates with a heat compensation structure was reported. The main objective of this work was to design and fabricate the poly-...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782555/ https://www.ncbi.nlm.nih.gov/pubmed/36557388 http://dx.doi.org/10.3390/mi13122090 |