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Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure

I Microhotplates are critical devices in various MEMS sensors that could provide appropriate operating temperatures. In this paper, a novel design of poly-Si membrane microhotplates with a heat compensation structure was reported. The main objective of this work was to design and fabricate the poly-...

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Detalles Bibliográficos
Autores principales:	Lu, Xiaorui, Liu, Jiahui, Han, Guowei, Si, Chaowei, Zhao, Yongmei, Hou, Zhongxuan, Zhang, Yongkang, Ning, Jin, Yang, Fuhua
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782555/ https://www.ncbi.nlm.nih.gov/pubmed/36557388 http://dx.doi.org/10.3390/mi13122090

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