Design and Fabrication of an Integrated Hollow Concave Cilium MEMS Cardiac Sound Sensor

In light of a need for low-frequency, high sensitivity and broadband cardiac murmur signal detection, the present work puts forward an integrated MEMS-based heart sound sensor with a hollow concave ciliary micro-structure. The advantages of a hollow MEMS structure, in contrast to planar ciliated mic...

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Detalles Bibliográficos
Autores principales: Wang, Bo, Shi, Pengcheng, Yang, Yuhua, Cui, Jiangong, Zhang, Guojun, Wang, Renxin, Zhang, Wendong, He, Changde, Li, Yirui, Wang, Shuotong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782983/
https://www.ncbi.nlm.nih.gov/pubmed/36557472
http://dx.doi.org/10.3390/mi13122174

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782983/
https://www.ncbi.nlm.nih.gov/pubmed/36557472
http://dx.doi.org/10.3390/mi13122174

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