Concepts and Key Technologies of Microelectromechanical Systems Resonators

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stabi...

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Detalles Bibliográficos
Autores principales: Feng, Tianren, Yuan, Quan, Yu, Duli, Wu, Bo, Wang, Hui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/
https://www.ncbi.nlm.nih.gov/pubmed/36557494
http://dx.doi.org/10.3390/mi13122195

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/
https://www.ncbi.nlm.nih.gov/pubmed/36557494
http://dx.doi.org/10.3390/mi13122195

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