Detection Methods for Multi-Modal Inertial Gas Sensors

We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed–fixed microbeams with an actuation electrode extending over one-half...

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Detalles Bibliográficos
Autores principales: Najar, Fehmi, Ghommem, Mehdi, Kocer, Samed, Elhady, Alaa, Abdel-Rahman, Eihab M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785199/
https://www.ncbi.nlm.nih.gov/pubmed/36560058
http://dx.doi.org/10.3390/s22249688

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785199/
https://www.ncbi.nlm.nih.gov/pubmed/36560058
http://dx.doi.org/10.3390/s22249688

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