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Detection Methods for Multi-Modal Inertial Gas Sensors

We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed–fixed microbeams with an actuation electrode extending over one-half...

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Autores principales: Najar, Fehmi, Ghommem, Mehdi, Kocer, Samed, Elhady, Alaa, Abdel-Rahman, Eihab M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785199/
https://www.ncbi.nlm.nih.gov/pubmed/36560058
http://dx.doi.org/10.3390/s22249688
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author Najar, Fehmi
Ghommem, Mehdi
Kocer, Samed
Elhady, Alaa
Abdel-Rahman, Eihab M.
author_facet Najar, Fehmi
Ghommem, Mehdi
Kocer, Samed
Elhady, Alaa
Abdel-Rahman, Eihab M.
author_sort Najar, Fehmi
collection PubMed
description We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed–fixed microbeams with an actuation electrode extending over one-half of the beam span in order to maximize the actuation of asymmetry. A nonlinear dynamic reduced-order model of the sensor is first developed and validated. It is then deployed to investigate the design of sensors that exploit the spatially complex and dynamically rich motions that arise due to veering and modal hybridization between the first symmetric and the first anti-symmetric modes of the beam. Specifically, we compare among the performance of four sensors implemented on a common platform using four detection mechanisms: classical frequency shift, conventional bifurcation, modal ratio, and differential capacitance. We find that frequency shift and conventional bifurcation sensors have comparable sensitivities. On the other hand, modal interactions within the veering range and modal hybridization beyond it offer opportunities for enhancing the sensitivity and SNR of bifurcation-based sensors. One method to achieve that is to use the modal ratio between the capacitances attributed to the symmetric and asymmetric modes as a detector, which increases the detection signal by three orders of magnitude compared to a conventional bifurcation sensor. We also present a novel sensing mechanism that exploits a rigid arm extending transversely from the arch beam mid-point and placed at equal distances between two side electrodes. It uses the asymmetry of the arch beam motions to induce rotary motions and realize a differential sensor. It is found to increase the detection signal by two orders of magnitude compared to a conventional bifurcation sensor.
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spelling pubmed-97851992022-12-24 Detection Methods for Multi-Modal Inertial Gas Sensors Najar, Fehmi Ghommem, Mehdi Kocer, Samed Elhady, Alaa Abdel-Rahman, Eihab M. Sensors (Basel) Article We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed–fixed microbeams with an actuation electrode extending over one-half of the beam span in order to maximize the actuation of asymmetry. A nonlinear dynamic reduced-order model of the sensor is first developed and validated. It is then deployed to investigate the design of sensors that exploit the spatially complex and dynamically rich motions that arise due to veering and modal hybridization between the first symmetric and the first anti-symmetric modes of the beam. Specifically, we compare among the performance of four sensors implemented on a common platform using four detection mechanisms: classical frequency shift, conventional bifurcation, modal ratio, and differential capacitance. We find that frequency shift and conventional bifurcation sensors have comparable sensitivities. On the other hand, modal interactions within the veering range and modal hybridization beyond it offer opportunities for enhancing the sensitivity and SNR of bifurcation-based sensors. One method to achieve that is to use the modal ratio between the capacitances attributed to the symmetric and asymmetric modes as a detector, which increases the detection signal by three orders of magnitude compared to a conventional bifurcation sensor. We also present a novel sensing mechanism that exploits a rigid arm extending transversely from the arch beam mid-point and placed at equal distances between two side electrodes. It uses the asymmetry of the arch beam motions to induce rotary motions and realize a differential sensor. It is found to increase the detection signal by two orders of magnitude compared to a conventional bifurcation sensor. MDPI 2022-12-10 /pmc/articles/PMC9785199/ /pubmed/36560058 http://dx.doi.org/10.3390/s22249688 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Najar, Fehmi
Ghommem, Mehdi
Kocer, Samed
Elhady, Alaa
Abdel-Rahman, Eihab M.
Detection Methods for Multi-Modal Inertial Gas Sensors
title Detection Methods for Multi-Modal Inertial Gas Sensors
title_full Detection Methods for Multi-Modal Inertial Gas Sensors
title_fullStr Detection Methods for Multi-Modal Inertial Gas Sensors
title_full_unstemmed Detection Methods for Multi-Modal Inertial Gas Sensors
title_short Detection Methods for Multi-Modal Inertial Gas Sensors
title_sort detection methods for multi-modal inertial gas sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785199/
https://www.ncbi.nlm.nih.gov/pubmed/36560058
http://dx.doi.org/10.3390/s22249688
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