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Towards Improved Humidity Sensing Nanomaterials via Combined Electron and NH(3) Treatment of Carbon-Rich FEBID Deposits

Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits which co...

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Detalles Bibliográficos
Autores principales: Boeckers, Hannah, Swiderek, Petra, Rohdenburg, Markus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785463/
https://www.ncbi.nlm.nih.gov/pubmed/36558308
http://dx.doi.org/10.3390/nano12244455