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Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed....
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/ https://www.ncbi.nlm.nih.gov/pubmed/36557419 http://dx.doi.org/10.3390/mi13122121 |