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Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed....
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/ https://www.ncbi.nlm.nih.gov/pubmed/36557419 http://dx.doi.org/10.3390/mi13122121 |
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author | Liu, Xingbao Rui, Xiaoting Mi, Liang Tang, Qiang Chen, Heng Xia, Yangqiu |
author_facet | Liu, Xingbao Rui, Xiaoting Mi, Liang Tang, Qiang Chen, Heng Xia, Yangqiu |
author_sort | Liu, Xingbao |
collection | PubMed |
description | The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed. The nonlinearity error of capacitive displacement probes, misalignment error of the probes, eccentric error of standard spheres, error caused by environment temperature change, environment vibration and error separation methods are analyzed and the effects of the above factors are obtained; Multiple measurement examples carried out with the measurement system this paaper constructed indicate the repeatability of the measurement system reaches 10.5 nm and the roundness error of artifact separated is less than 4.03 nm. In order to evaluate the measurement dispersion of the ultra-precision axis radial error, the major uncertainty components and the complete process of the comprehensive evaluation of the measurement uncertainty are proposed. The combined uncertainty of radial error motion measurement of the ultra-precision axis with Donaldson reversal is 31.64 nm (k = 2). |
format | Online Article Text |
id | pubmed-9786809 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-97868092022-12-24 Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision Liu, Xingbao Rui, Xiaoting Mi, Liang Tang, Qiang Chen, Heng Xia, Yangqiu Micromachines (Basel) Article The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed. The nonlinearity error of capacitive displacement probes, misalignment error of the probes, eccentric error of standard spheres, error caused by environment temperature change, environment vibration and error separation methods are analyzed and the effects of the above factors are obtained; Multiple measurement examples carried out with the measurement system this paaper constructed indicate the repeatability of the measurement system reaches 10.5 nm and the roundness error of artifact separated is less than 4.03 nm. In order to evaluate the measurement dispersion of the ultra-precision axis radial error, the major uncertainty components and the complete process of the comprehensive evaluation of the measurement uncertainty are proposed. The combined uncertainty of radial error motion measurement of the ultra-precision axis with Donaldson reversal is 31.64 nm (k = 2). MDPI 2022-11-30 /pmc/articles/PMC9786809/ /pubmed/36557419 http://dx.doi.org/10.3390/mi13122121 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Liu, Xingbao Rui, Xiaoting Mi, Liang Tang, Qiang Chen, Heng Xia, Yangqiu Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title | Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title_full | Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title_fullStr | Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title_full_unstemmed | Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title_short | Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision |
title_sort | radial error motion measurement and its uncertainty estimation of ultra precision axes of rotation with nanometer level precision |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/ https://www.ncbi.nlm.nih.gov/pubmed/36557419 http://dx.doi.org/10.3390/mi13122121 |
work_keys_str_mv | AT liuxingbao radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision AT ruixiaoting radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision AT miliang radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision AT tangqiang radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision AT chenheng radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision AT xiayangqiu radialerrormotionmeasurementanditsuncertaintyestimationofultraprecisionaxesofrotationwithnanometerlevelprecision |