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Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision

The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed....

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Autores principales: Liu, Xingbao, Rui, Xiaoting, Mi, Liang, Tang, Qiang, Chen, Heng, Xia, Yangqiu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/
https://www.ncbi.nlm.nih.gov/pubmed/36557419
http://dx.doi.org/10.3390/mi13122121
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author Liu, Xingbao
Rui, Xiaoting
Mi, Liang
Tang, Qiang
Chen, Heng
Xia, Yangqiu
author_facet Liu, Xingbao
Rui, Xiaoting
Mi, Liang
Tang, Qiang
Chen, Heng
Xia, Yangqiu
author_sort Liu, Xingbao
collection PubMed
description The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed. The nonlinearity error of capacitive displacement probes, misalignment error of the probes, eccentric error of standard spheres, error caused by environment temperature change, environment vibration and error separation methods are analyzed and the effects of the above factors are obtained; Multiple measurement examples carried out with the measurement system this paaper constructed indicate the repeatability of the measurement system reaches 10.5 nm and the roundness error of artifact separated is less than 4.03 nm. In order to evaluate the measurement dispersion of the ultra-precision axis radial error, the major uncertainty components and the complete process of the comprehensive evaluation of the measurement uncertainty are proposed. The combined uncertainty of radial error motion measurement of the ultra-precision axis with Donaldson reversal is 31.64 nm (k = 2).
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spelling pubmed-97868092022-12-24 Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision Liu, Xingbao Rui, Xiaoting Mi, Liang Tang, Qiang Chen, Heng Xia, Yangqiu Micromachines (Basel) Article The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed. The nonlinearity error of capacitive displacement probes, misalignment error of the probes, eccentric error of standard spheres, error caused by environment temperature change, environment vibration and error separation methods are analyzed and the effects of the above factors are obtained; Multiple measurement examples carried out with the measurement system this paaper constructed indicate the repeatability of the measurement system reaches 10.5 nm and the roundness error of artifact separated is less than 4.03 nm. In order to evaluate the measurement dispersion of the ultra-precision axis radial error, the major uncertainty components and the complete process of the comprehensive evaluation of the measurement uncertainty are proposed. The combined uncertainty of radial error motion measurement of the ultra-precision axis with Donaldson reversal is 31.64 nm (k = 2). MDPI 2022-11-30 /pmc/articles/PMC9786809/ /pubmed/36557419 http://dx.doi.org/10.3390/mi13122121 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Liu, Xingbao
Rui, Xiaoting
Mi, Liang
Tang, Qiang
Chen, Heng
Xia, Yangqiu
Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title_full Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title_fullStr Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title_full_unstemmed Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title_short Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
title_sort radial error motion measurement and its uncertainty estimation of ultra precision axes of rotation with nanometer level precision
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/
https://www.ncbi.nlm.nih.gov/pubmed/36557419
http://dx.doi.org/10.3390/mi13122121
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