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AACVD of Cu(3)N on Al(2)O(3) Using CuCl(2) and NH(3)
Cu(3)N has been grown on m-Al(2)O(3) by aerosol-assisted chemical vapor deposition using 0.1 M CuCl(2) in CH(3)CH(2)OH under an excess of NH(3) at 600 °C, which led to the deposition of Cu that was subsequently converted into Cu(3)N under NH(3): O(2) at 400 °C in a two-step process without exposure...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787788/ https://www.ncbi.nlm.nih.gov/pubmed/36556770 http://dx.doi.org/10.3390/ma15248966 |