Polishing Performance and Removal Mechanism of Core-Shell Structured Diamond/SiO(2) Abrasives on Sapphire Wafer

Corrosive and toxic solutions are normally employed to polish sapphire wafers, which easily cause environmental pollution. Applying green polishing techniques to obtain an ultrasmooth sapphire surface that is scratch-free and has low damage at high polishing efficiency is a great challenge. In this...

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Detalles Bibliográficos
Autores principales: Zhao, Guangen, Xu, Yongchao, Wang, Qianting, Liu, Jun, Zhan, Youji, Chen, Bingsan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787999/
https://www.ncbi.nlm.nih.gov/pubmed/36557459
http://dx.doi.org/10.3390/mi13122160

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787999/
https://www.ncbi.nlm.nih.gov/pubmed/36557459
http://dx.doi.org/10.3390/mi13122160

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