Cargando…

Polishing Performance and Removal Mechanism of Core-Shell Structured Diamond/SiO(2) Abrasives on Sapphire Wafer

Corrosive and toxic solutions are normally employed to polish sapphire wafers, which easily cause environmental pollution. Applying green polishing techniques to obtain an ultrasmooth sapphire surface that is scratch-free and has low damage at high polishing efficiency is a great challenge. In this...

Descripción completa

Detalles Bibliográficos
Autores principales:	Zhao, Guangen, Xu, Yongchao, Wang, Qianting, Liu, Jun, Zhan, Youji, Chen, Bingsan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787999/ https://www.ncbi.nlm.nih.gov/pubmed/36557459 http://dx.doi.org/10.3390/mi13122160

Ejemplares similares

Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing
por: Cao, Linlin, et al.
Publicado: (2023)

The Synthesis of the Core/Shell Structured Diamond/Akageneite Hybrid Particles with Enhanced Polishing Performance
por: Lu, Jing, et al.
Publicado: (2017)

The Mechanism of Layer Stacked Clamping (LSC) for Polishing Ultra-Thin Sapphire Wafer
por: Chen, Zhixiang, et al.
Publicado: (2020)

Synthesis and Luminescence Properties of Core-Shell-Shell Composites: SiO(2)@PMDA-Si-Tb@SiO(2) and SiO(2)@PMDA-Si-Tb-phen@SiO(2)
por: Feng, Lina, et al.
Publicado: (2019)

Investigation on the Basic Characteristics of Semi-Fixed Abrasive Grains Polishing Technique for Polishing Sapphire (α-Al(2)O(3))
por: Lei, Yang, et al.
Publicado: (2022)

Controlled synthesis and luminescence properties of core-shell-shell structured SiO(2)@AIPA-S-Si-Eu@SiO(2) and SiO(2)@AIPA-S-Si-Eu-phen@SiO(2) nanocomposites
por: Qiao, Yan, et al.
Publicado: (2020)

Probing the Optical Properties of MoS(2) on SiO(2)/Si and Sapphire Substrates
por: Han, Tao, et al.
Publicado: (2019)

Synthesis and photoluminescence properties of silica-modified SiO(2)@ANA-Si-Tb@SiO(2), SiO(2)@ANA-Si-Tb-L@SiO(2) core–shell–shell nanostructured composites
por: Feng, Lina, et al.
Publicado: (2019)

In Situ Study of the Wet Chemical Etching of SiO(2) and Nanoparticle@SiO(2) Core–Shell Nanospheres
por: Grau-Carbonell, Albert, et al.
Publicado: (2021)

Wafer scale BN on sapphire substrates for improved graphene transport
por: Vangala, Shivashankar, et al.
Publicado: (2018)

Direct growth of wafer-scale highly oriented graphene on sapphire
por: Chen, Zhaolong, et al.
Publicado: (2021)

High-efficient fabrication of core-shell-shell structured SiO(2)@GdPO(4):Tb@SiO(2) nanoparticles with improved luminescence
por: Bai, He, et al.
Publicado: (2020)

Surface Patterning with SiO(2)@PNiPAm Core–Shell Particles
por: Tang, Jo Sing Julia, et al.
Publicado: (2018)

In Situ Coatings of Polymeric Films with Core Polystyrene, Core–Shell Polystyrene/SiO(2), and Hollow SiO(2) Micro/Nanoparticles and Potential Applications
por: Hayne, Sharon, et al.
Publicado: (2023)

Influence of SiO(2) shell thickness on power conversion efficiency in plasmonic polymer solar cells with Au nanorod@SiO(2) core-shell structures
por: Zhang, Ran, et al.
Publicado: (2016)

Multi-Foci Laser Separation of Sapphire Wafers with Partial Thickness Scanning
por: Lye, Celescia Siew Mun, et al.
Publicado: (2022)

Effect of Abrasive Grain Concession on Micromechanical Behavior of Lapping Sapphire by FAP
por: Xu, Huimin, et al.
Publicado: (2022)

Effects of SiO(2) Filler in the Shell and Wood Fiber in the Core on the Thermal Expansion of Core–Shell Wood/Polyethylene Composites
por: Sun, Lichao, et al.
Publicado: (2020)

Transparent Display using a quasi-array of Si-SiO(2) Core-Shell Nanoparticles
por: Dolatyari, Mahboubeh, et al.
Publicado: (2019)

Development and Upscaling of SiO(2)@TiO(2) Core-Shell Nanoparticles for Methylene Blue Removal
por: Gomes, Bárbara R., et al.
Publicado: (2023)

An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO(2) Layer
por: Zarzycki, Artur, et al.
Publicado: (2019)

Interfacial effect of dual ultra-thin SiO(2) core–triple shell Au@SiO(2)@Ag@SiO(2) for ultra-sensitive trinitrotoluene (TNT) detection
por: Lu, Bingxin, et al.
Publicado: (2020)

Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer
por: Li, Peng, et al.
Publicado: (2023)

Synthesis of SiC/SiO(2) core–shell nanowires with good optical properties on Ni/SiO(2)/Si substrate via ferrocene pyrolysis at low temperature
por: Chen, Bo-Yu, et al.
Publicado: (2021)

Synthesis and Characterization of Novel Core–Shell ZnO@SiO(2) Nanoparticles and Application in Antibiotic and Bacteria Removal
por: Pham, Tien-Duc, et al.
Publicado: (2022)

FDTD Simulations of Shell Scattering in Au@SiO(2) Core–Shell Nanorods with SERS Activity for Sensory Purposes
por: Kon, Igor, et al.
Publicado: (2022)

Enhanced functionalization of Mn(2)O(3)@SiO(2 )core-shell nanostructures
por: Vaidya, Sonalika, et al.
Publicado: (2011)

Synthesis and Adsorption Property of SiO(2)@Co(OH)(2) Core-Shell Nanoparticles
por: Meng, Yongde
Publicado: (2015)

Al@SiO(2) Core–Shell Fillers Enhance Dielectric Properties of Silicone Composites
por: Huang, Bin, et al.
Publicado: (2023)

Ion Drift and Polarization in Thin SiO(2) and HfO(2) Layers Inserted in Silicon on Sapphire
por: Popov, Vladimir P., et al.
Publicado: (2022)

Effect of Size-Dependent Thermal Instability on Synthesis of Zn(2) SiO(4)-SiO(x) Core–Shell Nanotube Arrays and Their Cathodoluminescence Properties
por: Li, Chun, et al.
Publicado: (2010)

SiO(2)@MnO(x)@Na(2)WO(4)@SiO(2) core–shell-derived catalyst for oxidative coupling of methane
por: Park, La-Hee, et al.
Publicado: (2020)

Synthesis and detection the oxidization of Co cores of Co@SiO(2) core-shell nanoparticles by in situ XRD and EXAFS
por: Zhang, Kunhao, et al.
Publicado: (2015)

Wafer-Scale LSPR Substrate: Oblique Deposition of Gold on a Patterned Sapphire Substrate
por: Kim, Kihyeun, et al.
Publicado: (2022)

Core-shell of FePt@SiO(2)-Au magnetic nanoparticles for rapid SERS detection
por: Hardiansyah, Andri, et al.
Publicado: (2015)

Preparation and Characterization of WS(2)@SiO(2) and WS(2)@PANI Core-Shell Nanocomposites
por: Sade, Hagit, et al.
Publicado: (2018)

Effect of the Composition of Lanthanide Complexes on Their Luminescence Enhancement by Ag@SiO(2) Core-Shell Nanoparticles
por: Wang, Xiao-Jing, et al.
Publicado: (2018)

Synthesis and thermal stability of ZrO(2)@SiO(2) core–shell submicron particles
por: Finsel, Maik, et al.
Publicado: (2019)

Improved emission of SiV diamond color centers embedded into concave plasmonic core-shell nanoresonators
por: Szenes, András, et al.
Publicado: (2017)

One-pot one-step synthesis of Au@SiO(2) core–shell nanoparticles and their shell-thickness-dependent fluorescent properties
por: Zhang, Shan, et al.
Publicado: (2019)

Cannot write session to /tmp/vufind_sessions/sess_bdc5vs7pob8g6n8mss7u550kan