Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit

A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid structure (SS) one by heat transfer capacity simulation....

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Detalles Bibliográficos
Autores principales: Peng, Xinlin, Ji, Yucheng, Chen, Shuo, Guo, Song, Feng, Liuhaodong, Xu, Yang, Wang, Shinan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788257/
https://www.ncbi.nlm.nih.gov/pubmed/36557551
http://dx.doi.org/10.3390/mi13122252

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788257/
https://www.ncbi.nlm.nih.gov/pubmed/36557551
http://dx.doi.org/10.3390/mi13122252

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