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Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit
A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid structure (SS) one by heat transfer capacity simulation....
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788257/ https://www.ncbi.nlm.nih.gov/pubmed/36557551 http://dx.doi.org/10.3390/mi13122252 |