A Customizable and Low-Cost Ultraviolet Exposure System for Photolithography

For microfluidic device fabrication in the research, industry, and commercial areas, the curing and transfer of patterns on photoresist relies on ultraviolet (UV) light. Often, this step is performed by commercial mask aligner or UV lamp exposure systems; however, these machines are often expensive,...

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Detalles Bibliográficos
Autores principales: Reynolds, David Eun, Lewallen, Olivia, Galanis, George, Ko, Jina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788398/
https://www.ncbi.nlm.nih.gov/pubmed/36557428
http://dx.doi.org/10.3390/mi13122129

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788398/
https://www.ncbi.nlm.nih.gov/pubmed/36557428
http://dx.doi.org/10.3390/mi13122129

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