Optimization of Processing Parameters and Adhesive Properties of Aluminum Oxide Thin-Film Transition Layer for Aluminum Substrate Thin-Film Sensor

A thin-film strain micro-sensor is a cutting force sensor that can be integrated with tools. Its elastic substrate is an important intermediate to transfer the strain generated by the tools during cutting to the resistance-grid-sensitive layer. In this paper, 1060 aluminum is selected as the elastic...

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Detalles Bibliográficos
Autores principales: Zhao, Yongjuan, Wu, Wenge, Cheng, Yunping, Yan, Wentao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788627/
https://www.ncbi.nlm.nih.gov/pubmed/36557414
http://dx.doi.org/10.3390/mi13122115

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9788627/
https://www.ncbi.nlm.nih.gov/pubmed/36557414
http://dx.doi.org/10.3390/mi13122115

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