Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices

[Image: see text] In many nano(opto)electronic devices, the roughness at surfaces and interfaces is of increasing importance, with roughness often contributing toward losses and defects, which can lead to device failure. Consequently, approaches that either limit roughness or smoothen surfaces are r...

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Detalles Bibliográficos
Autores principales: Gerritsen, Sven H., Chittock, Nicholas J., Vandalon, Vincent, Verheijen, Marcel A., Knoops, Harm C. M., Kessels, Wilhelmus M. M., Mackus, Adriaan J. M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9791650/
https://www.ncbi.nlm.nih.gov/pubmed/36583128
http://dx.doi.org/10.1021/acsanm.2c04025

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9791650/
https://www.ncbi.nlm.nih.gov/pubmed/36583128
http://dx.doi.org/10.1021/acsanm.2c04025

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