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Ferroelectric-Antiferroelectric Transition of Hf(1–x)Zr(x)O(2) on Indium Arsenide with Enhanced Ferroelectric Characteristics for Hf(0.2)Zr(0.8)O(2)
[Image: see text] The ferroelectric (FE)–antiferroelectric (AFE) transition in Hf(1–x)Zr(x)O(2) (HZO) is for the first time shown in a metal–ferroelectric–semiconductor (MFS) stack based on the III-V material InAs. As InAs displays excellent electron mobility and a narrow band gap, the integration o...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9798826/ https://www.ncbi.nlm.nih.gov/pubmed/36588621 http://dx.doi.org/10.1021/acsaelm.2c01483 |