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Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

ITO/Mo bilayer thin films were sputtered on n-type silicon and glass substrates and annealed with a Nd:YAG pulsed laser. The structural results show that both the as-deposited and the annealed ITO/Mo thin films have a polycrystalline structure, and that the annealing treatment enhanced the crystalli...

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Detalles Bibliográficos
Autores principales: Hacini, Abdelbaki, Hadi Ali, Ahmad, Adnan, Nurul Nadia, Nayan, Nafarizal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9811308/
https://www.ncbi.nlm.nih.gov/pubmed/36636737
http://dx.doi.org/10.3762/bjnano.13.133