Cargando…

Structure and Thermal Stability of ε/κ-Ga(2)O(3) Films Deposited by Liquid-Injection MOCVD

We report on crystal structure and thermal stability of epitaxial ε/κ-Ga(2)O(3) thin films grown by liquid-injection metal–organic chemical vapor deposition (LI-MOCVD). Si-doped Ga(2)O(3) films with a thickness of 120 nm and root mean square surface roughness of ~1 nm were grown using gallium-tetram...

Descripción completa

Detalles Bibliográficos
Autores principales:	Dobročka, Edmund, Gucmann, Filip, Hušeková, Kristína, Nádaždy, Peter, Hrubišák, Fedor, Egyenes, Fridrich, Rosová, Alica, Mikolášek, Miroslav, Ťapajna, Milan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9821604/ https://www.ncbi.nlm.nih.gov/pubmed/36614359 http://dx.doi.org/10.3390/ma16010020

Ejemplares similares

In(Ga)N 3D Growth on GaN-Buffered On-Axis and Off-Axis (0001) Sapphire Substrates by MOCVD
por: Rosová, Alica, et al.
Publicado: (2022)

Mg Doping of N-Polar, In-Rich InAlN
por: Kuzmík, Ján, et al.
Publicado: (2023)

MOCVD Growth and Characterization of Be-Doped GaN
por: McEwen, Benjamin, et al.
Publicado: (2022)

MOCVD Growth of High-Quality and Density-Tunable GaAs Nanowires on ITO Catalyzed by Au Nanoparticles Deposited by Centrifugation
por: Wu, Dan, et al.
Publicado: (2015)

Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model
por: Li, Jian, et al.
Publicado: (2018)

Luminescence Characteristics of the MOCVD GaN Structures with Chemically Etched Surfaces
por: Ceponis, Tomas, et al.
Publicado: (2023)

Deposition of Magnetite Nanofilms by Pulsed Injection MOCVD in a Magnetic Field
por: Zukova, Anna, et al.
Publicado: (2018)

Development of Monolithically Grown Coaxial GaInN/GaN Multiple Quantum Shell Nanowires by MOCVD
por: Ito, Kazuma, et al.
Publicado: (2020)

Chemical characterization of extra layers at the interfaces in MOCVD InGaP/GaAs junctions by electron beam methods
por: Frigeri, Cesare, et al.
Publicado: (2011)

Fabrication of Ga(2)O(3) Schottky Barrier Diode and Heterojunction Diode by MOCVD
por: Jiao, Teng, et al.
Publicado: (2022)

Short-wavelength light beam in situ monitoring growth of InGaN/GaN green LEDs by MOCVD
por: Sun, Xiaojuan, et al.
Publicado: (2012)

Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD
por: Zhang, Jin, et al.
Publicado: (2014)

Influence of stress in GaN crystals grown by HVPE on MOCVD-GaN/6H-SiC substrate
por: Zhang, Lei, et al.
Publicado: (2014)

Indium droplet formation in InGaN thin films with single and double heterojunctions prepared by MOCVD
por: Chen, Yung-Sheng, et al.
Publicado: (2014)

Hillock assisted p-type enhancement in N-polar GaN:Mg films grown by MOCVD
por: Rocco, Emma, et al.
Publicado: (2020)

Analyses of 2-DEG characteristics in GaN HEMT with AlN/GaN super-lattice as barrier layer grown by MOCVD
por: Xu, Peiqiang, et al.
Publicado: (2012)

Self-Seeded MOCVD Growth and Dramatically Enhanced Photoluminescence of InGaAs/InP Core–Shell Nanowires
por: Ji, Xianghai, et al.
Publicado: (2018)

Regulation of Hole Concentration and Mobility and First-Principle Analysis of Mg-Doping in InGaN Grown by MOCVD
por: Zhang, Lian, et al.
Publicado: (2021)

Reduction of Polarization Field Strength in Fully Strained c-Plane InGaN/(In)GaN Multiple Quantum Wells Grown by MOCVD
por: Zhang, Feng, et al.
Publicado: (2016)

Comprehensive Comparison of MOCVD- and LPCVD-SiN(x) Surface Passivation for AlGaN/GaN HEMTs for 5G RF Applications
por: Deng, Longge, et al.
Publicado: (2023)

Enhanced light extraction efficiency of Eu-related emission from a nano-patterned GaN layer grown by MOCVD
por: Lesage, A., et al.
Publicado: (2019)

Demonstration of MOCVD-grown Ga(2)O(3) power MOSFETs on sapphire with in-situ Si-doped by tetraethyl orthosilicate (TEOS)
por: Ngo, Sao Thien, et al.
Publicado: (2023)

β-Ga(2)O(3) MOSFETs electrical characteristic study of various etching depths grown on sapphire substrate by MOCVD
por: Lu, Chan-Hung, et al.
Publicado: (2023)

Large-Area MoS(2) Films Grown on Sapphire and GaN Substrates by Pulsed Laser Deposition
por: Španková, Marianna, et al.
Publicado: (2023)

Controlling graphene work function by doping in a MOCVD reactor
por: Klein, Chen, et al.
Publicado: (2018)

Theory of MOCVD Growth of III-V Nanowires on Patterned Substrates
por: Dubrovskii, Vladimir G.
Publicado: (2022)

GaAs Nanomembranes in the High Electron Mobility Transistor Technology
por: Gregušová, Dagmar, et al.
Publicado: (2021)

Wafer-scale MoS(2) with water-vapor assisted showerhead MOCVD
por: Macha, Michal, et al.
Publicado: (2022)

The Effect of a Nucleation Layer on Morphology and Grain Size in MOCVD-Grown β-Ga(2)O(3) Thin Films on C-Plane Sapphire
por: Dimitrocenko, Lauris, et al.
Publicado: (2022)

Micropatterning of TiO(2) Thin Films by MOCVD and Study of Their Growth Tendency
por: Hwang, Ki-Hwan, et al.
Publicado: (2015)

One-step growth of thin film SnS with large grains using MOCVD
por: Clayton, Andrew J., et al.
Publicado: (2018)

Process-Induced Nanostructures on Anatase Single Crystals via Pulsed-Pressure MOCVD
por: Gorthy, Rukmini, et al.
Publicado: (2020)

Temperature Dependence of Stress and Optical Properties in AlN Films Grown by MOCVD
por: Wei, Wenwang, et al.
Publicado: (2021)

MOCVD Growth and Structural Properties of ZnS Nanowires: A Case Study of Polytypism
por: Kumar, Sumit, et al.
Publicado: (2022)

Large-Scale MOCVD Deposition of Nanostructured TiO(2) on Stainless Steel Woven: A Systematic Investigation of Photoactivity as a Function of Film Thickness
por: Galenda, Alessandro, et al.
Publicado: (2022)

Piezoelectric BiFeO(3) Thin Films: Optimization of MOCVD Process on Si
por: Micard, Quentin, et al.
Publicado: (2020)

Epitaxial and large area Sb(2)Te(3) thin films on silicon by MOCVD
por: Rimoldi, Martino, et al.
Publicado: (2020)

Photocatalytic Degradation of Methyl Orange and Methylene Blue Dyes by Engineering the Surface Nano-Textures of TiO(2) Thin Films Deposited at Different Temperatures via MOCVD
por: Khalifa, Zaki S., et al.
Publicado: (2023)

Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films
por: Zhao, Ruipeng, et al.
Publicado: (2017)

Noble Metals for Modern Implant Materials: MOCVD of Film Structures and Cytotoxical, Antibacterial, and Histological Studies
por: Dorovskikh, Svetlana I., et al.
Publicado: (2021)

Cannot write session to /tmp/vufind_sessions/sess_io85dvjdoj33i4gpbtthn0ascu