Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films

Impurities can be incorporated during thin film deposition, but also can originate from atmosphere exposure. As impurities can strongly affect the composition—structure—property relations in magnetron sputter deposited thin films, it is important to distinguish between both incorporation channels. T...

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Detalles Bibliográficos
Autores principales: Aliramaji, Shamsa, Keuter, Philipp, Neuß, Deborah, Hans, Marcus, Primetzhofer, Daniel, Depla, Diederik, Schneider, Jochen M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822154/
https://www.ncbi.nlm.nih.gov/pubmed/36614754
http://dx.doi.org/10.3390/ma16010414

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822154/
https://www.ncbi.nlm.nih.gov/pubmed/36614754
http://dx.doi.org/10.3390/ma16010414

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